Research on three-stage amplified compliant mechanism-based piezo-driven microgripper

Electrostatically Driven Microgripper

In this work we report on microactuators and microgrippers fabricated from SOI (Silicon On Insulator) wafers by a surface and bulk micromachining fabrication technology. The main advantages of this technology are: a) large thickness of the devices (10 μm up to 40 μm) resulting in devices which are stable against disturbing forces perpendicular (z-direction) to the ground plate. b) the small num...

Dynamic modeling of 3-DOF pyramidal-shaped piezo-driven mechanism

A piezo‐driven flapping wing mechanism for micro air vehicles

2006). Flapping wing MAVs (FWMAVs) are a class of new conceptual MAVs that take design cues from flying insects in order to achieve a small size (<3–5 cm), high maneuverability and super remote ability (Yan et al. 2015). A FWMAV is expected to work in a variety of confined spaces such as urban canyons, caves, indoors, and jungles that large flying robots can’t be serviceable. To achieve such ta...

Development of Piezo-Driven Compliant Bridge Mechanisms: General Analytical Equations and Optimization of Displacement Amplification

Compliant bridge mechanisms are frequently utilized to scale micrometer order motions of piezoelectric actuators to levels suitable for desired applications. Analytical equations have previously been specifically developed for two configurations of bridge mechanisms: parallel and rhombic type. Based on elastic beam theory, a kinematic analysis of compliant bridge mechanisms in general configura...

Piezo-driven metrological multiaxis nanopositioner

We report on the development of a metrological multiaxis nanopositioning device, which is operated by the piezo-based inertial method, as a sample stage for scanning probe microscopy. It has long moving range, unlimited in principle, and nanometer ~microradian! resolution. Two operation methods, inertial sliding and inertial walking, can be applied to the stage and the inertial operating method...